Abstract
Films of ultrahigh-purity aluminum 150-μ thick were vacuum deposited on nickel ribbon as a technique for fabricating strip conductors. These films were deposited from an electron-beam gun which was mounted in an oil diffusion pumped vacuum system. Sources of film contamination were isolated analytically and the techniques used to eliminate them are described and verified analytically.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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