Thermoreflectance-based approach for surface temperature measurements of thin-film gold sensors.

Abstract

A novel thermoreflectance-based diagnostic tool capable of visualizing spatial and temporal changes in surface temperature is presented. The method uses narrow spectral emission bands of blue [λ = 405nm with 10nm full-width-at-half-maximum (FWHM)] and green (λ = 532nm with 10nm FWHM) light to monitor the optical properties of gold and thin-film gold sensors, relating changes in reflectivity to temperature through a known calibration coefficient. The system is made robust to tilt and surface roughness variations through the simultaneous measurement of both probing channels with a single camera. Experimental validation is performed on two forms of gold materials heated from room temperature to 200 °C at a rate of ∼100 °C/min. Subsequent image analysis shows perceptible changes in reflectivity in the narrow band of green light, while the blue light remains temperature-insensitive. The reflectivity measurements are used to calibrate a predictive model with temperature-dependent parameters. The physical interpretation of the modeling results is given, and the strengths and limitations of the presented approach are discussed.