Abstract
Thermomechanical properties of amorphous hydrogenated carbon-germanium alloys prepared by the rf sputtering technique were determined for films in the 0 at. % to 100 at. % carbon content range. The stress, thermal expansion coefficient, and elastic modulus were obtained using the thermally induced bending technique. The stress was related to the concentration of hydrogen and argon, to the difference in the Ge-Ge and Ge-C bond length, and to the carbon hybridization. The thermal expansion coefficients of pure amorphous germanium and amorphous carbon are higher than that of their corresponding crystalline counterparts, which was attributed to the compressive stress of the films. The biaxial modulus, on the other hand, are always smaller than that of their crystalline counterparts, but increases as the concentration of carbon increases due to the substitution of Ge-Ge bonds by energetically stronger Ge-C and C-C bonds.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Applied Physics A Materials Science & Processing
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
