Abstract
Thermomagnetic patterning (TMP) of 4 μm thick high performance NdFeB hard magnetic films deposited on Si substrates has been achieved using single pulsed laser irradiation. Uniaxially magnetised chessboard and stripe patterns with lateral feature sizes in the range 50–100 μm were produced. The depth of reversal was estimated, using both global (vibrating sample magnetometry) and localized (scanning Hall probe) measurements, to be in the range of 1.1–1.2 μm. A simple model provides semiquantitative agreement with the experimental results. A linear Halbach array was fabricated to demonstrate the potential of TMP for the realization of complex multidirectional microflux sources.
Highlights
HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not
Thermomagnetic patterningTMPof 4 m thick high performance NdFeB hard magnetic films deposited on Si substrates has been achieved using single pulsed laser irradiation
Microflux sources produce magnetic fields which are spatially modulated at the micron scale
Summary
HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. This idea has already been used in various contexts, in general to achieve bit by bit writing15,16 or to produce millimeter-sized surface patterns in bulk magnets via irradiation through a mask.17 The specificity of the approach described in this paper is to propose a method for the patterning of integratable hard magnetic films at the micron scale.
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