Abstract
The thermoluminescence (TL) properties of amorphous aluminum oxide thin films subjected to ultraviolet (UV) irradiation are reported. Aluminum oxide thin films were prepared by laser ablation from an α -Al 2O 3 target using Nd:YAG laser with emission at the fundamental line. Compositional, structural and morphological properties of the obtained thin films as a function of the growth conditions have been studied. Experimental results show that amorphous aluminum oxide thin films with atomic concentrations of aluminum and oxygen close to those of stoichiometric Al 2O 3 and with splashed particles on its surface were obtained. The TL response as a function of the growth parameters has been investigated in order to improve such response. Thermoluminescence glow curves exhibited one peak centered at 174 °C. The results presented in this work, shows that it is possible to obtain materials in thin film form with thickness as low as 150 nm, which exhibits TL response to UV irradiation. These results suggest that aluminum oxide thin films are suitable for detection and monitoring of UV light.
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