Abstract

A novel type of thermoelectric generator device (TEGD) based on carbon nanotube (CNT) membrane is introduced to realize the self-powered function of nano/micro electromechanical systems (N/MEMS) in some special environments. The TEGD unit is composed of an n-type CNT membrane and a p-type one connected in series. When temperature gradient exists between both ends of the TEGD unit, electric potential difference will generate. The TEGD is formed through connecting several TEGD units in series to get enough electric power. In the paper, CNT membranes of the TEGD are synthesized by the chemical vapor deposition (CVD) method and the TEGD properties are researched in detail. Experimental results demonstrated that the TEGD has much use value and bright application prospect in the future.

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