Abstract
Au loaded TiO2 (Au/TiO2) ceramic thick film catalyst was integrated on a micro Thermoelectric Gas Sensor (TGS). We have investigated the catalytic activity of the Au/TiO2 catalyst for CO oxidation and the CO sensing performance of the micro-TGS with this catalyst. CO started to burn when the Au/TiO2 catalyst was exposed to 1 vol% CO in air at an operating temperature of 150°C, which was detected by the output voltage of the TGS. A good linearity between the CO concentrations in air (from 250 ppm to 1 vol%) and the voltage signal of the sensor (from 0.15 mV to 5.0 mV) was obtained at an operating temperature of 200°C.
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