Abstract

Using a thermoelectric gas sensor, a method to detect wide range and high-concentration hydrogen was developed. The thermoelectric gas sensor was fabricated by depositing platinum catalyst thin film on the half surface of nickel oxide thick film. The sensor detected hydrogen for the concentration from 0.025 to 10% in air, with a good linearity of voltage signal versus gas concentration. By coupling this sensor and the air mixing set-up, high hydrogen concentration gas of range up to 100% (1 atm H 2) balanced with nitrogen was measured with a good linearity.

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