Thermoelastic damping of the axisymmetric vibration of laminated trilayered circular plate resonators

Abstract

Thermoelastic damping is a critical loss mechanism in micromachined resonators used for sensing and communication applications. In this paper, thermoelastic damping of the axisymmetric vibration of laminated circular plate resonators will be discussed. Based on the classical laminated plate theory assumptions, the governing equations of coupled thermoelastic problems are established for axisymmetric out-of-plane vibration of trilayered circular plate with fully clamped boundary conditions. The analytical expression for thermoelastic damping is obtained and the accuracy is verified through comparison with FEM results. Then the effect of material selection and the volume fraction of the covering layers are numerically evaluated. Finally, the thermoelastic damping for different vibration modes is also evaluated.