Thermoelastic damping in thin microrings with two-dimensional heat conduction

Abstract

Accurate determination of thermoelastic damping (TED) is very challenging in the design of micro-resonators. Microrings are widely used in many micro-resonators. In the past, to model the TED effect on the microrings, some analytical models have been developed. However, in the previous works, the heat conduction within the microring is modeled by using the one-dimensional approach. The governing equation for heat conduction is solved only for the one-dimensional heat conduction along the radial thickness of the microring. This paper presents a simple analytical model for TED in microrings. The two-dimensional heat conduction over the thermoelastic temperature gradients along the radial thickness and the circumferential direction are considered in the present model. A two-dimensional heat conduction equation is developed. The solution of the equation is represented by the product of an assumed sine series along the radial thickness and an assumed trigonometric series along the circumferential direction. The analytical results obtained by the present 2-D model show a good agreement with the numerical (FEM) results. The limitations of the previous 1-D model are assessed.