Abstract
We show that the dominant energy loss mechanism in plate modes of a 1.5 μm thick silicon micromechanical resonator is thermoelastic damping. In situ ultra-high vacuum annealing lowers the dissipation of two neighboring resonance modes (460 and 510 kHz) at 120 K to Q−1≤5×10−7. From 120 to 400 K, the Q−1 of these modes increase at different rates, in quantitative agreement with a modification (that accounts for mode shape) of Zener’s theory of thermoelastic damping.
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