Abstract
The paper is focused on the developing a predictive mathematical model for describing thermodynamic processes connected with the moist air depressurization in vacuum chambers. Equations of the mathematical description are based on principles of the energy and mass conservation, which are complemented by the moist air thermodynamics, the state behavior of water and vapor, including principles of the critical flow. The described problem has been solved using the MATLAB software. In the paper, two cases are applied and discussed: the vacuum drying and the specimen chamber of an environmental scanning electron microscope. The specific requirements are especially important for environmental scanning electron microscopes, where it is possible to observe samples, which contain water, in their natural condition. If the air pressure, temperature and humidity do not have suitable values, observed sample may be dried or damaged.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
