Abstract

Two metastable crystalline phases, i.e., hcp and fcc, were formed in Nb-rich Nb-Fe, Nb-Co, and Nb-Ni multilayered films by room temperature 200 keV xenon ion mixing. The experimental results revealed that the formation sequence was first hcp and then fcc through an abnormal two-step phase transition of bcc→hcp→fcc. To give insight into the phase formation, Gibbs free-energy diagrams of the systems were constructed by the calculation method proposed by Alonso, Gallego, and Somozar [Nuovo Cimento, 12, 587 (1990)]. Besides, steady-state thermal annealing experiments of the corresponding as-deposited multilayers were conducted and the results confirmed the existence as well as the energetic sequence of the hcp and fcc phases predicted by the calculated free-energy diagram. Concerning the growth kinetics of the two metastable crystalline phases, the two-step phase transition was determined to be a shearing plus sliding mechanism.

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