Abstract
Optical beam scanning is a widely utilized function in optical systems and a compact nonmechanical solid-state device has long been anticipated. Here, we have studied such a device consisting of photonic crystal slow-light waveguides and switch trees, fabricated by a Si photonics process, employing a bespoke prism lens for beam collimation. Further in this study, we particularly demonstrated the operation of the device only by the thermo-optic (TO) tuning of its components, at a fixed wavelength of light. A spot beam of ~0.1° divergence, was scanned in two dimensions, in the angular range of 40° × 8.8° and average power consumption of <; 0.7 W. Neglecting some disordered beams caused by the non-uniformity of the fabricated device, the estimated number of resolution points was 400 × 32 = 12,800, which required a significant effort in the device fabrication and calibration, utilizing optical-phased arrays, if the same performance was targeted.
Highlights
A N OPTICAL beam scanner is employed for laser processing, laser microscopy, laser display and projection, printing, decoding, three-dimensional (3D) profiling, motion capturing, identification, optical coherence tomography, light detection and ranging (LiDAR), etc
A micro-electro-mechanical system (MEMS) mirror is a practical solution for the construction of a miniature system, other constraints remain
If slow-light waveguide gratings are employed in 1D optical phased arrays (OPAs), a wide steering range would be obtained in 2D and the full operation by the TO tuning without the λ sweep would be available
Summary
A N OPTICAL beam scanner is employed for laser processing, laser microscopy, laser display and projection, printing, decoding, three-dimensional (3D) profiling, motion capturing, identification, optical coherence tomography, light detection and ranging (LiDAR), etc. 1D OPAs, consisting of waveguide gratings, have been employed as a practical solution [5] In this scheme, the λ sweep is necessary, and the steering range in the direction along the waveguides is limited. If slow-light waveguide gratings are employed in 1D OPAs, a wide steering range would be obtained in 2D and the full operation by the TO tuning without the λ sweep would be available. TAMANUKI et al.: THERMO-OPTIC BEAM SCANNER EMPLOYING SILICON PHOTONIC CRYSTAL SLOW-LIGHT WAVEGUIDES. We have proposed this third scheme, and so far developed a device consisting of LSPCWs and switch trees, which are all integrated by the Si photonics complementary-metal oxidesemiconductor (CMOS) process, as well as a bespoke collimator lens [16].
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