Abstract
ABSTRACTThe thermo-mechanical behavior of magnetron sputtered Fe polycrystalline films of thickness between 50 nm and 400 nm has been investigated. The state of stress has been determined by means of wafer curvature and X-ray diffraction (sin2ψ-method). Both methods are in good agreement for layers of thickness above 200 nm. For specimens of smaller layer thickness, however, the average stresses as measured by X-ray diffraction are systematically higher than those observed by wafer curvature experiments. The results can be interpreted in terms of differences in micro-strain (estimated using X-ray diffraction peak width analysis) and grain size as obtained by transmission and scanning electron microscopy. Thermal cycling experiments were performed between RT and 873 K. The effect of microstructure on thermo-mechanical properties was shown to be crucial.
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