Thermally induced structural modification in the Al/Zr multilayers

Abstract

The effect of increasing temperature on the structural stability and interactions of two kinds of Al/Zr (Al(1%wtSi)/Zr and Al(Pure)/Zr) multilayer mirrors are investigated. All Al/Zr multilayers annealed from 200°C to 500°C were deposited on Si wafers by using direct-current magnetron sputtering technology. A detailed and consistent picture of the thermally induced changes in the microstructure is obtained using an array of complementary measurements including grazing incidence X-ray reflectometry, atomic force microscopy, X-ray diffraction and high-resolution transmission electron microscopy. The first significant structural changes of two systems are observed at 250°C, characterized by asymmetrical interlayers appearing at interface. At 290°C, the interface consisting of amorphous Al–Zr alloy is transformed to amorphous Al–Zr alloy and cubic ZrAl3 in both systems. At 298°C for Al(1%wtSi)/Zr and 295°C for Al(Pure)/Zr multilayers, the interfacial phases of Al–Zr alloy transform into polycrystalline mixtures of hcp-ZrAl2 and cubic-ZrAl3, which smooth the interface boundary and lower the surface roughness in the multilayers. Up to 500°C, the multilayer structure still exists in both systems, and the differences between the asymmetrical interlayers are much larger in the multilayers. Finally, we discuss the transformation from symmetrical to asymmetrical in the annealing process for other multilayer systems.