Abstract
A novel thermal wave based pyroelectric thin film solid state sensor shown to be capable of responding to H2 gas flows in N 2 or in air under ambient temperature and pressure conditions is described. The new sensor exhibits an extremely wide detection dynamic range: 100% to 25 ppm hydrogen in nitrogen, and a 10 to 90% signal rise time of approximately 10 s, limited by the inertia of the gas delivery system. The extended dynamic range is achieved through two complementary oper- ating mechanisms, resulting in a thermophysical and a chemical re- sponse at high and low H2 concentrations, respectively. © 1997 Society of Photo-Optical Instrumentation Engineers.
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