Abstract
Cubic δ-NbNfilm with (200) texture, hexagonalδ′-NbN films with a mixed (100)+(110) texture and (110) texture have been deposited on Si (100) substrate at-40, -160 and-200Vsubstrate bias, respectively. Vacuum heat treatments were performed to investigate the effects of annealing temperature on structural stability and hardness of δ-NbN and δ′-NbN films. The results show that for δ-NbN film and δ′-NbN films with a strong (110) texture,no phase transition occuredafter heat treatments.But for δ′-NbN films with a mixed (100)+(110) texture, phase transition from δ′-NbN to δ-NbNtook place, which can be ascribed to small lattice mismatch between δ′-NbN (100) and δ-NbN (111) and low phase transition barrier. In addition, the high substrate bias can improve the interface adhesion due to interface mixing resulting from high energy ions bombardment. Even after annealing at 900°C, the hardness for δ′-NbN deposited at-200V still remains 32GPa, which shows a potential application at the field of protect coatings.
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