Thermal stability of Cr1−xAlxSiyN coatings with medium and high aluminium content prepared by arc evaporation

Abstract

ABSTRACTThe thermal stability of Cr1−xAlxN and Cr1−xAlxSiyN nanocomposite coatings with different composition x, Si content, and phase structure has been investigated. The coatings were deposited in an industrial unit by the cathodic arc evaporation method, using rotating cylindrical cathodes. Further sets of coated WC/Co plates were subjected to an annealing step in a forming gas (92% N2 / 8% H2) atmosphere for several hours at a constant temperature (maximum 1000°C). Chemical composition, microstructure and mechanical properties of the coatings were investigated by the RBS, XRD, TEM, SEM, XPS and nanoindentation techniques.As-deposited Cr1−xAlxSiyN coatings with Al contents x in the range of 0.4 ≤ x ≤ 0.6 showed a single-phase cubic CrAlN structure and a maximum hardness of 38 GPa. With increasing the Al content to x = 0.95 – 0.96, two-phase films consisting of hexagonal AlN and cubic CrAlN structure with hardness of about 31 GPa were obtained. The hardness of Cr1−xAlxSiyN coatings increases during annealing at temperatures in the range of 800 – 1000°C by about 1 – 4 GPa, even though the residual compressive stress in the coatings was found to relax considerably during this procedure. The addition of Si into Cr1−xAlxN delays the appearance of hcp-AlN and thereby improves the thermal stability of the coatings.