Abstract
In order to better understand the relations between the deposition conditions, the microstructure and hydrogen and/or nitrogen incorporation in polymeric films the thermal stability of coatings prepared in atmospheric pressure glow discharge was studied. The polymeric films were prepared from the mixture of hexamethyldisiloxane (HMDSO) or hexamethyldisilazane (HMDSZ) with nitrogen in atmospheric pressure glow discharge (APGD). The hydrogen and/or nitrogen evolved from polymeric films were studied by ther.
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