Abstract
The thermal stability of amorphous hard carbon films produced by cathodic arc deposition was studied by near edge x-ray absorption fine structure (NEXAFS) spectroscopy, Raman spectroscopy, and nanoindentation evaluation. Pure carbon films of up to 85% sp3 content were deposited using a pulsed biasing technique and annealed in ultrahigh vacuum up to 850 °C. NEXAFS spectra show no change in the film properties up to 700 °C, and a modification of the spectra for 800 and 850 °C, which indicate graphitization. Raman spectra show only a very slight change up to 850 °C. The nanoindentation data show no change in hardness and elastic modulus with annealing up to 850 °C. The study demonstrates the high thermal stability of the films. The difference in the NEXAFS and the Raman and nanoindentation results can be attributed to the surface sensitivity of NEXAFS in comparison to the more bulk sensitivity of Raman spectroscopy and nanoindentation.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
