Thermal reactions and micro-structure of TiN–AlN layered nano-composites

Abstract

Bilayer and multilayer structures of TiN and AlN thin films were synthesized using pulsed laser deposition technique in a substrate temperature range 300–700°C. The chemical reactions at TiN–AlN interfaces and the formation of different alloy phases were studied using X-ray diffraction (XRD) and transmission electron microscopy (TEM). It was observed that TiN–AlN interface remains sharp and stable for deposition temperatures up to ∼650°C. At higher deposition temperatures, however, substantial chemical reactions were found to occur. The ternary alloy phases such as Ti 3Al 2N 2 and Ti 3AlN have been observed, for the first time. The composites synthesized at temperatures lower than 650°C and subsequently annealed at higher temperature were found to exhibit very limited or no interfacial chemical reactions. The effect of layer thickness on the microstructure is also studied. The studies revealed that by controlling the thickness of individual layers and substrate temperatures, it was possible to control microstructure and obtain composite coatings consisting of ternary Ti–Al–N alloy phases. The results are discussed in terms of characteristic features of pulsed laser ablation process in which evaporated flux contains energetic ions, electrons and neutral particles. Preliminary nano-indentation measurements and oxidation measurements reveal that these composites possess desirable mechanical properties at high temperatures.