Abstract
Thin, amorphous, high index, dense, low scattering & absorption (low extinction coefficient) and optical grade TiO2 films of various thicknesses are prepared by Atomic layer deposition (ALD) technique and investigated in terms of thermo-optic coefficient (dn/dT) and temperature dependent density (dρ/dT). The dρ/dT and dρ/dT are calculated by modeling ellipsometric experimental data by developing appropriate optical model such as Cauchy Model. The modeled data was further modeled with Lorentz-Lorenz relation under least-square approach. The dn/dT of TiO2 films shows negative values for thin and positive values for relatively thicker films and reveals no significant changes in dn/dT and dρ/dT when film thickness increases more than ~ 200 nm. The coefficient values are calculated for a wavelength range of 380–1800 nm. The average values of (dn/dT)60nm= −4.2 ± 0.7 × 10−5°C−1 and (dρ/dT)60nm= −6.6 ± 1.1 × 10−5gcm−3 °C−1 at wavelength of 640 nm. The reported coefficients values are measured and calculated for TiO2 film of thickness t = 60 nm and described in detail.
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