Abstract

The thermal properties of some titanium precursors such as titanium (IV) isopropoxide (Ti[OPri]4 = TTIP); titanium(IV) ethoxide (Ti[OEt]4); titanium tetradimethylaminopropanol (Ti[DMAP]4) have been investigated by complex thermal analysis (thermogravimetric analysis etc.), mass-spectrometry, tensimetric methods (static and flow methods). The temperature dependences of saturated vapour pressure of titanium precursors have been obtained in a wide range of temperatures and thermodynamic parameters of vaporization processes have been calculated. Thermal decomposition of TTIP vapor has been investigated by high temperature mass spectrometry; temperature range and gaseous by-products were determined.

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