Abstract
Abstract Fabrication of optical information processing chips involves a lot of thermal processing with silicon and electro-optic material. The information of thermal properties becomes important in this technology. Thermal conductivity, thermal diffusivity and specific heat of ceramic lanthanum modified lead zirconate titanate (PLZT), single crystal lithium tantalate (LiTaO3) and lithium niobate (LiNbO3) have been measured. Measurements were made over various temperature ranges (up to 400°C). The techniques used to make the measurements are described. Comparison is made to available data.
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