Abstract
ABSTRACTTime-domain thermoreflectance (TDTR) is a powerful method for measuring thermal properties, such as thermal conductivity and thermal boundary resistance, of a broad variety of thin-film materials and interfaces. Dual-side TDTR, in which measurements are performed on the top and bottom sides of a suspended region of a thin film of interest, has recently emerged as an effective way to investigate the thermal properties of a film that is thermally anisotropic and/or inhomogeneous. Despite its experimental versatility, dual-side TDTR has yet to be fully interrogated. In this work, we examine the thermal conductivity and boundary resistance of anisotropic and/or inhomogeneous suspended thin films, extracted by dual-side TDTR on these films via numerical simulation. We start from a simple case of an anisotropic or inhomogeneous suspended membrane and then consider the combined case where the suspended membrane is both anisotropic and inhomogeneous. Taken together with analysis of measurement sensitivity, we aim to provide a general guideline for data extraction methodologies for dual-side TDTR on anisotropic and/or inhomogeneous suspended thin films.
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