Abstract
In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam structure and reticular structure are designed. These designs have a reliable mechanical strength, so they can be designed and fabricated on single-layer SiO2 suspended film through a simplified process. Single-layer suspended film helps to reduce power consumption. Based on the new film shapes, different resistance heaters with various widths and thicknesses are designed. Then, the temperature uniformity and power consumption of different micro hotplates are compared to study the effect of these variables and obtain the one with the optimal thermal performance. We report the simulations of temperature uniformity and give the corresponding infrared images in measurement. The experimental temperature differences are larger than those of the simulation. Experimental results show that the lowest power consumption and the minimum temperature difference are 43 mW and 50 °C, respectively, when the highest temperature on the suspended platform (240 × 240 μm2) is 450 °C. Compared to the traditional four-beam micro hotplate, temperature non-uniformity is reduced by about 30–50%.
Highlights
Experimental results show that the lowest power consumption and the minimum temperature difference are 43 mW and 50 ◦ C, respectively, when the highest temperature on the suspended platform (240 × 240 μm2 ) is 450 ◦ C
A micro hotplate (MHP), a heater isolated on a membrane, can be used in gas sensors, micro heat meters, gas flow meters, infrared light sources, and so on [1,2,3]
Micromachined metal oxide gas sensors with a micro hotplate often need to be able to operate at Micromachined metal oxide gas sensors with a micro hotplate often need to be able to operate a temperature which ranges from 200 ◦ C up to 400 ◦ C, and the temperature distribution needs to be as at a temperature which ranges from 200 °C up to 400 °C, and the temperature distribution needs to uniform as possible [19]
Summary
A micro hotplate (MHP), a heater isolated on a membrane, can be used in gas sensors, micro heat meters, gas flow meters, infrared light sources, and so on [1,2,3]. Many of the previously designed micro hotplates use multilayer composite films, because SiO2 has compressive stress, while Si3 N4 has tensile stress. 2 composite membrane, substrate presented a design with passivation, metal heater and electrodes, and a dielectric layer of. Kaur developed a double fabricate the suspended-membrane micro hotplate with Si island. Suspended platform anda micro stress concentration the connection between the beam and the platform. Suspended films with different numbers of beams were designed in [16], difference was more than 100 ◦ C [15]. Suspended films with different numbers of beams were designed was more 100 °C [15]. Previous paper for their better properties [17]
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