Abstract
A thermal oxidation process of diamond films grown by chemical vapor deposition (CVD) has been studied. The oxidation was realized via heating of the CVD films in air. Pristine and oxidized CVD diamond films were analyzed with Raman spectroscopy and scanning electron microscopy (SEM) techniques. Raman spectroscopy revealed substantial changes in the polycrystalline diamond film composition induced by oxidation. A selective oxidation of disordered carbon and small size diamond crystallites was obtained at appropriate temperatures. A model explaining the formation and oxidation of the CVD diamond films containing the micrometer single diamond cores surrounded by the nanocrystalline diamond and disordered carbon has been proposed on the basis of the obtained results.
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