Abstract

Abstract A micro hotplate (MHP) array was made by incorporating several MHPs into a single chip as an integrated sensor array. The sensing film must operate at a specific high temperature condition (300–400 °C) with a low power consumption. In addition, each hotplate should be independent and all the hotplates should be uniform thermally. Therefore, the thermal characteristics of the individual hotplate must be measured. In this work, the temperature distribution in a 2×2 MHP array was measured using infrared thermography. The temperature distribution of the small area and other thermal characteristics were obtained, providing reliable experimental information for the design of the MHP array.

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