Abstract
Thermal detection based on the thermal shift of the resonant frequency of a bimetal resonator (Al/Si) is presented and demonstrated. The bimetal oscillator with a tip is fabricated at the end of a commercial silicon cantilever. The bimetal oscillator and the silicon cantilever have a resonance frequency of 441 and 91 kHz, respectively, and the measured temperature coefficients of the resonant frequency are -127x10(-6)/K and -115x10(-6)/K, respectively. It is demonstrated that self-oscillated resonant frequency of the bimetal oscillator changes in response to heat from a microheat source. Simultaneous measurements of topography and temperature profile with the temperature resolution of 0.12 K on a glass substrate heated using a thin chromium film microheater are successfully demonstrated. These results show potential abilities of the mechanical resonant thermal sensor.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
