Abstract
The initial stages of the thermal double donor (TDD) formation in Cz-Si crystals are considered. Some basic parameters (binding energy, rate of dissociation, steady-state concentration, diffusivity) of the most abundant oxygen cluster - oxygen dimer are estimated. A good correlation between the behaviours of oxygen dimers and trimers, and the IR absorption bands at 1012 cm-1 and 1006 cm-1 is found. It is shown that some features of the enhanced oxygen diffusion and TDD generation are not consistent with a conception of the very fast diffusing oxygen dimers. Along with dimers the mobility of trimers and the first TDD species is suggested.
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