Abstract
AlN/CrN superlattices with a B1 cubic crystal structure and a bilayer period of 4nm were deposited by reactive radiofrequency magnetron sputtering. The coatings were investigated with respect to their thermal stability and changes in microstructure and chemical composition at 900°C. The AlN layers show high chemical stability but undergo dissolution by pinching off at grain boundaries. A transformation from cubic to hexagonal AlN with subsequent coarsening at grain boundary triple junctions is observed. In contrast to AlN, the CrN layers show poor chemical stability and their compositions are shifted towards Cr2N upon annealing in a protective argon atmosphere due to nitrogen loss. However, even after establishing Cr2N stoichiometry the crystal structure of the layers remains cubic.
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