Thermal desorption spectroscopy on silicon

Abstract

Traced back to the early work on Thermal Desorption Spectroscopy (TDS) a short introductory survey is given on the experimental method, basic relations and the further development of evaluation procedures. Ad- and desorption of hydrogen on silicon as a seemingly simple system is discussed chiefly in terms of TDS results. Though the main H 2 desorption phase is apparently of 2nd order the expected peak temperature ( T p) shift is often missing and in addition minor phases appear. Ethene adsorption also reveals the main H 2 phase from a monohydride state with a similar T p behaviour and similar desorption energies from Arrhenius plots. For the more complex methanol adsorption, various spectra are given and discussed in view of the aforesaid systems. By means of deuterated methanol adsorption the evolution of the differently bonded “hydrogen” is studied. A simple one-phase hydrogen desorption cannot explain the obtained parameters and features.