Thermal Conductivity of Graphene Layers Encased in Oxide

Abstract

Experimental knowledge of the heat flow along graphene layers encased by oxide is essential for future graphene-based nanoelectronics, interconnects, and thermal management structures. We used a “heat spreader method” to study the heat dissipation performance of encased graphene. Fitting the experimental data with a three-dimensional finite-element method (FEM) allows the in-plane thermal conductivity of the graphene layers to be extracted. The method is validated on samples with metal films of known thermal conductivity, as determined from electrical resistance measurements and the Wiedemann-Franz law.