Abstract
The thermal conductivity of amorphous silicon thin films is determined by using the non-intrusive, in situ optical transmission measurement as well as by the 3 ω method. The temperature dependence of the film complex refractive index is determined by spectroscopic ellipsometry. The acquired transmission signal is fitted with predictions obtained by coupling conductive heat transfer with multi-layer thin film optics in the optical transmission measurement. The results of the two independent methods are in close agreement.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
