Abstract

In this work we study the effects of disorder on the thermal conductivity of porous 100 nm thick silicon membranes, in which the size, shape and position of the pores were varied randomly. Measurements using two-laser Raman thermometry on both non-patterned and porous membranes revealed more than a 10-fold reduction of the thermal conductivity compared to that of bulk silicon and a six-fold reduction compared to non-patterned membranes for the sample with random pore shapes. Using Monte Carlo methods we solved the Boltzmann transport equation for phonons and compared different possibilities of pore organization and its influence on the thermal conductivity of the samples. The simulations confirmed that the strongest reduction of thermal conductivity is achieved for a distribution of pores with arbitrary shapes that partially overlap. Up to a 15% reduction of the thermal conductivity with respect to the purely circular pores was predicted for a porous membrane with 37% filling fraction. The effect of the pore shape and distribution was further studied. Maps of temperature and heat flux distributions clearly showed that for particular pore placement heat transport can be efficiently blocked and hot spots can be found in narrow channels between pores. These findings have an impact on the fabrication of membrane-based thermoelectric devices, where low thermal conductivity is required. This work shows that for porous membranes with a given filling fraction the thermal conductivity can be further modified by introducing disorder in the shape and placement of the pores.

Highlights

  • Physical models prefer to describe perfectly ordered systems, they are hard to find in nature; real systems always contain defects and disorder

  • We have previously investigated the influence of short-range disorder in Si membrane-based two-dimensional phononic crystals (PnCs) on their GHz and THz phononic properties and showed that low-frequency phonon modes are affected by periodicity, their impact is not sufficient to affect thermal conductivity at room temperature (RT)

  • In order to fabricate the disordered structures here we have modified the fabrication process based on electron beam lithography (EBL) and reactive ion etching (RIE) on free-standing membranes (Norcada Inc.) [8]

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Summary

Introduction

Physical models prefer to describe perfectly ordered systems, they are hard to find in nature; real systems always contain defects and disorder. In many systems the presence of disorder is considered unfavorable, recent works have shown that it can improve or add functionality to the system. Disordered nanostructures on the surface of flower petals produce visual signals which attract bees [1]. Photon transport and collimation can be strongly enhanced in disordered structures [2].

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