Abstract
A precision air bearing rotary stage driven by direct-driven motor is proposed. The structural characteristic of the rotary system is introduced, and the mechanism of structural thermal deformation and heat dissipation of aerostatic direct drive rotary stage were analyzed. The simulation models of static and transient temperature field are built, and thermal-structure coupled filed is calculated. The internal steady thermal field diagram and key nodes temperature curve of the rotary stage are obtained. Based on the temperature analysis results, the rotary stage structural deformation is established. The cooling method is provided, and result shows that the cooling way is effective.
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