Thermal characterisation of high-aspect-ratio nanoheaters using IR thermography

Abstract

Recently, micro/nanoheater have been used and studied in various fields such as sensors. In particular, they have become important in biology and medicine. In this paper, we propose a novel measurement method which can indirectly measure the temperature distribution of a nanoheater’s surface from side temperature measurements using infrared microscopes. Two different types of nanoheaters are fabricated and their thermal behaviours are analysed and characterised. They are fabricated in a top-down approach using silicon-on-insulator wafers and basic MEMS processes. Nanoheaters with a high-aspect-ratio are fabricated: a width of 200 nm, length of 100 μm and height of 30 μm. The nanoheater’s surface is doped with boron by ion implantation for joule heating. Their thermal profile depending on their heat sink type was investigated. In conclusions, it is expected that a nanoheater with exact temperature control and thermally efficient structural design can be applied for bio-molecule manipulation.