Abstract
Low energy Ag ions were implanted into silicon and annealed at different temperatures in order to generate plasmonic active silicon hybrids. It was found that as the ion fluence of irradiation was increased, a monotonic decrease in the absorption spectra in the ultraviolet region occurs, due to amorphization and macrostructuring of the Si surface. At the same time, the optical spectra are characterized by a strong band after implantation presenting the contribution of the surface plasmon resonance (SPR) of Ag nanoparticles. After heat treatment at 500 and 600?C, the SPR peak shifts to lower wavelengths, as compared to as implanted samples, whereas the plasmon position shifts to higher wavelengths for annealing at 700?C. This observation can be explained by either an out-diffusion of Ag or by stress relaxation and recrystallization of silicon.
Highlights
Over the last decades metallic nanoparticles have been the subject of many experiments because of their large technological applicability
Monocrystalline Si samples were implanted with 75 keV Ag ions in order to synthesize a plasmonic active Ag-Si near surface hybrid
A series of experiments were conducted as a function of ion fluence and subsequent annealing temperature
Summary
Over the last decades metallic nanoparticles have been the subject of many experiments because of their large technological applicability. In recent years a great deal of interest has been focused on the synthesis of transitional metal (e.g. Ag, Cu, Fe, Au) nanostructures at the surface to sub-surface regions of Si and SiO2matrices for possible application in technological devices with enhanced electronic and optical properties [9,10,11,12,13]. In all of these applications, the size, shape and distribution of the metallic nanoparticles in the silicon matrix play a key role [14,15]. The shift in the SPR peak position of silver nanoparticles was investigated and the correlation with the structural changes was discussed
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