Abstract
As an innovative optical processing technology based on the chemical reaction, inductively coupled atmospheric pressure plasma processing (IC-APPP) technology has the advantages of high processing efficiency, non-mechanical damage and low cost. Inductively coupled plasma jet (ICP) can be characterized by the high temperature and enthalpy, which is the prerequisite of high material removal rate in optical processing. Thermal analysis is critical to characterize the IC-APPP of optics. Based on the energy balance theory in the low-temperature plasma processing, the heat transfer process of substrate was analyzed and boundary conditions in the model were proposed. The gas temperature of the impinging jet was obtained by the simulation of plasma jet characteristics using finite element analysis, which acts as the input to the heat transfer model of IC-APPP process. Experiments were carried out to validate the accuracy of model and thermal effect on the removal rate was analyzed for IC-APPP. Results suggest that there exist varying degrees of nonlinearity with different temperature ranges in the IC-APPP.
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