Abstract

A general expression for the energy loss probability in scanning transmission electron microscopy (STEM) is derived. The method uses a Green's function for the incident and scattered electrons and then folds the specimen into a local response function. Our expression is appropriate to any target geometry and dielectric response. As an application, the energy loss spectrum of a STEM electron moving close to an Al sphere half-embedded in an Al planar surface is calculated. The coupling between different l modes, neglected in earlier theoretical approaches, is taken into account.

Highlights

  • Fisica de MaterialesF, acultad de QutmicaU, niversidad del Pais Vasco Eu-skal Herriko Unibertsitatea, Apdo 1072, 20080 San Sebastian, Spain

  • Experimental results show that dielectric excitation theory is capable of predicting the loss spectra, allowing a fully consistent dielectric characterization of an interface or a small particle [19]

  • A calculation for more complicated geometries could lay a foundation for the application of electron energy loss spectroscopy to a new range of challenging and important microstructural problems

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Summary

Introduction

Fisica de MaterialesF, acultad de QutmicaU, niversidad del Pais Vasco Eu-skal Herriko Unibertsitatea, Apdo 1072, 20080 San Sebastian, Spain. Theory of Energy Loss in Scanning Transmission Electron Microscopy of Supported Small Particles A general expression for the energy loss probability in scanning transmission electron microscopy (STEM) is derived.

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Conclusion

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