Theory of a plasma column sustained by a surface wave

Abstract

A self-consistent theory of a cylindrical plasma column sustained by a surface wave is derived which gives absolute values and radial profiles of electron density, electron temperature, HF electric field intensity and atomic excited state densities as a function of gas pressure, wave frequency and HF absorbed power. The basic equations are the continuity and the momentum transfer equations for both electrons and ions, the equations for the wave electric field and the power balance equation for electrons. The theory is applicable in the low attenuation regime. The plasma and field profiles are significantly different from the classical Bessel type and the field profiles of surface waves in homogeneous media, respectively. Depending on pressure the radial distribution of excited atoms is either flat or increases to reach a maximum near the wall.