Abstract
Optimization of SNMS depth profiling using the direct bombardment mode (DBM) is possible by improvement of the ion current density distribution, reduction of bombardment energy and independent choice of current density. A model for primary ion extraction is presented and ion current density distributions have been calculated for different sample holder arrangements. Using the simulation procedure optimal extraction conditions can be predicted for conventional arrangements and suggestions for new ones can be made. The best depth resolution has been obtained using a new extraction arrangement with an additional aperture.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
