Abstract
The leak flow through radial and axial clearances between fixed and orbiting scrolls is considered the dominant factor which determines the pumping performance of a dry-scroll vacuum pump. Since the leak flow sometimes ranges from viscous to slip to molecular flow along a clearance, an equation which is able to describe the flow through the three flow regimes is developed by the weighted linear combination of two equations for molecular flow and slip flow. The pressure distribution in gas pockets is considered another important factor for the pumping performance, which is calculated in the same manner as the leak flow. The predicted ultimate pressures show satisfactory agreement with the ultimate pressures of a practical machine.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
