Abstract
The spatial resolution of X-ray microanalysis has been investigated by Monte Carlo calculations, including knock-on secondary electron production. The results for AuMα in a l000A thin Au film at 100 keV showed an appreciable difference from the ones without knock-out events. Also calculations have been done with the Mott cross-section instead of the screened Rutherford cross-section for elastic scattering. A significant difference was found in the results among the three models.
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