Abstract

The Cl-passivated Si(111) surface is studied using density functional theory, in conjunction with the B3LYP functional and the cluster model. We compute the Si–Cl frequency and the Si–Cl bond energy for R 3SiCl, and the abstraction barrier for the reaction R 3SiCl+H→R 3Si+HCl using the B3LYP approach. We calibrate the B3LYP bond energy and the abstraction barriers using the values obtained using the G2MP2, G2 and CCSD(T) approaches. Our computed B3LYP Si–Cl frequency of 555 cm −1 is in good agreement with the experimental value of 588 cm −1. The shift in the Si–Cl frequency as surface chlorine is added to the cluster agrees with experimental observations.

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