Abstract
Monte Carlo (MC) electron dynamic simulations in dry and humid N2, O2, CO2 and air were performed in order to obtain electron energy distribution functions (EEDFs), mean free path (λ), drift velocity (v d) and collision frequency of electrons (ν), their mean energy \((\bar \varepsilon )\) and rate coefficients of electron impact reactions, as functions of reduced electric field strength (E/N) and concentration of H2O. The aim was to test the latest compilation of cross-sections for H2O, the applicability of the MC method used, and the effect of the H2O concentration.
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