Abstract

A theoretical model is established to describe the α-RF discharge in slab Oxygen Iodine lasers, according to the continuity equation of electron density, the electron energy equilibrium equation and the continuity equation of current density. Assuming a Maxwellian energy distribution, the spatial distributions of electron density and electric field in RF plasma are obtained by numerical method. The effects of parameters on discharge characteristics have been analyzed. The results show that the current density has a big effect on the electron density in discharge area. The influences of excitation frequency on the maximum value of electric field and the thickness of boundary layer are also discussed. And the spatial distributions of electron energy and excitation efficiency of singlet delta oxygen have been calculated. The influences of gas mixture on the excitation efficiency of singlet delta oxygen are discussed. It provides references of parameters for slab discharge in singlet delta oxygen generating.

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