Abstract
Diffraction efficiencies of transmission grating play important roles in accurate measurement of soft X-ray and grating applications. Circular, horizontal elliptical, and vertical elliptical arc profiled bar models were established from Kirchhoff diffraction theory with the Fraunhofer diffraction approximation to calculate the diffraction efficiencies of arc profiled bar transmission grating. The calculated results were compared with the available data from X-ray Optics web site of Lawrence Berkeley Laboratory's Center. Excellent agreements have been obtained. With these modes the diffraction efficiencies of the particular type of transmission grating having arc profiled bars can be simulated accurately and the best fit bar profiles can be obtained.
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