Abstract
Microstructure requires nanometer-scale surface roughness and micro- or even sub-micron form error accuracy in different applications. Two kinds of modeling theories and methods of micro-feature of rotating body and non-rotating body are studied, and the corresponding tool turning trajectory planning method is put forward. In order to process the designed micro-feature structure successfully and avoid the interference and overcutting between tool and workpiece caused by improper selection of tool parameters, the cutting parameters are analyzed and two error theories are proposed. Then, a precision-driven turning trajectory planning method is obtained, which can optimize the trajectory by adjusting turning parameters according to the setting errors. The experiments are carried out to verify the proposed theories, and the results of measurements are that the surface roughness and surface form accuracy of the cylindrical sine wave groove micro-feature surface are 0.1714 μm and 1.32 μm, respectively. The surface roughness and surface form accuracy of the cylindrical sinusoidal mesh micro-feature surface are 0.1625 μm and 1.8 μm, respectively. The results meet expectations and verify the reliability of the error theory and the trajectory optimization theory.
Highlights
It is of great significance to analyze and research micro features because it plays an important role in application to optics, biomimetics, medicine, communication and other fields
On the basis of tool parameter optimization selection, turning trajectory planning, error model establishment and turning trajectory parameter optimization, two kinds of cylindrical micro-features are machined by using single point diamond slow cutter servo turning method
The surface accuracy of the two machined microfeatures is measured by Talysurf PGI 1240 instrument, which is shown in Fig. 12, 13
Summary
It is of great significance to analyze and research micro features because it plays an important role in application to optics, biomimetics, medicine, communication and other fields. Tauhiduzzaman M. et al [4] studied the form error in diamond turning, and they thought the relative vibration between cutting tool and workpiece is the main cause of the error, and it is pointed out that the unbalanced spindle of machine tool has the most influence on machining of feature curved surface. B. et al [7] used single-point diamond turning with orthogonal slow-tool servo technology to process the corrugated micro-structure on the high-precision cylindrical surface under the 9 sets of different processing parameters. Mukaida M. et al [8] used slow-tool servo diamond turning technology to process micro-lens array on single silicon material, and they studied the machining form error, surface morphology and turning force experimentally. As can be seen from the above, there are many studies about how to improve surface quality during processing free surface on the plane, but few research about how to control the surface accuracy during processing free surface on the cylinder
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